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Applied Material 2 chamber Super E Etcher

Statistics: views/answers:342/2
Posted by:
austin3160
Location:
Arizona
Ad Status:
Closed

Manufacturer:
Applied Materials
Type:
Etcher
Model:
5200
Year (or range of years):
Condition:
Excellent
Price (in US dollars):
USD
Quantity:
1
Type of Seller:
Dealer Owner

Description:
This is a 200mm Super E Centura 5200 Attached are the specs:
Pumps:
Edwards iQDP80/QMB500 1EA
Edwards iQDP80/QMB500 1EA
Edwards iQDP80/QMB500 1EA
Edwards iQDP80/QMB500 1EA

Chiller:

LASEMTECH BCU-E110RS-001
SYSTEM CONFIGURATTION:
208Vac / 60Hz / 400Amp 200mm / Flat
Soft Ware Version : Robot Type :
4.8_26 VHP+
Loadlock Type : Umbilical Cable Options :
Narrow Body Standard
Chamber #A Type : Chamber #A Process :
Super-e Oxide etch
Chamber #B Type : Chamber #B Process : Super E Oxide Etch
Chamber #F
Orientator
Type :
Gas Panal Type : Gas Feed Options : Gas Panal Exhaust Options :
Standard Bottom Feed Top Feed
VME Rack Options : Generator Rack Options :
Standard Standard
End Point Options:
Monocrometer



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About this Applied Materials 5200 listing

- This is a for sale classified ad for a used, surplus or second hand Applied Materials 5200 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this listing or view this user's profile for detailed contact info.
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