2 chamber Oxide etcher, used on copper process.
CHAMBER A HDP OXIDE ETCH
CHAMBER B HDP OXIDE ETCH
CHAMBER 4 ORIENTER / DEGAS
"through the wall" configuration.
In CleanRoom / Power on/ Inspection available / ChA cathode has missing parts
Will be takenout and warehoused by the end of June 2007. Inspectionis available.
For configurations see attached pictures
Company: SDI Semiconductor Instruments Group Contact Name: Brandon Newell Status:Premium Member
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Ad Number: 78469
About this AMAT 5300 HDP listing - This is a for sale classified ad for a used, surplus or second hand AMAT 5300 HDP equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this AMAT 5300 HDP listing or view this user's member profile for detailed contact info.
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