Tegal 900 series Plasma/RIE etch System are used by the Semiconductor Industry for integrated circuit fabrication. The system are used in one part of the sequence of manufacturing steps that transfer a pattern formed from a layer of photosensitive material, the photoresist, to a layer that makes up a permanent part of the final device. The process of defining a pattern with photoresist known as photolithography, while the etch process transfers the photoresist pattern to the permanent layer.The 900 Series systems deliver highly reliable, repeatable results in etching a variety of films used to manufacture semiconductor, telecommunications and optoelectronics devices, flat panel displays and thin film magnetic heads.
The refurbished and upgraded Tegal 901e system is designed around a production-proven wafer transport design that can accommodate 75 mm to 150 mm round silicon, GaAs, InP, and dielectric material substrates. The transport can also be configured to accommodate rectangular substrates up to 125 mm on a side.
Combined with Allwin21 Corp Superior Temperature Control Technologyand AW Control Software, the refurbished and upgraded Tegal901e provides significant advantages over the original systems.
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About this Tegal Tegal 901 e listing - This is a for sale classified ad for a used, surplus or second hand Tegal Tegal 901 e equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Tegal Tegal 901 e listing or view this user's member profile for detailed contact info.
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