Wafer handling problems with Indexer System? Allwin21 has replaced the GaSonics Aura 1000 wafer handling system with the superior 3-axis Equipe ATM Wafer Handling Robot. This gives the A 1000 a much superior wafer transport system with proven reliability, higher throughput, increased MTBF and lower overall cost. Along with fewer headaches, better peace-of-mind, and longer coffee breaks.
GaSonic Aura 1000 Plasma System is the microprocessor controlled down-stream, or ? afterglow? photoresist stripper that will strip the front and backside of a wafer, typically in less than one minute. The unit is fully automated, cassette-to-cassette, and is a single-wafer process design.
Combined with Allwin21 Corp advanced Equip Robot transfer wafer technology , Superior Temperature Control Technology and AW Control Software, upgraded Gasonics Aura 1000 provides significant advantages over the original systems.
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