The Aura 3010(Aura3000) is a single-wafer downstream photoresist asher, delivers high ash rates with low damage, a large process window, and a choice of process temperatures during the ashing process. The system has a user friendly menu-driven user interface, and is suitable for automation via SMIF (Standard Mechanical Interface) or AGV (Automated Guided Vehicle).
Combined with Allwin21 Corp advanced Robot control technology , Superior Temperature Control Technologyand AW Control Software ,upgraded Gasonics Aura 3010(Gasonics Aura 3000) provides significant advantages over the original systems.
System diagnostics for the quick diagnostic of the system
Easier I/O set and checks function for the Maintenance.
RTP function with temperature control 2C accuracy from 50 to 500C with K-type thermocouple.
Higher through put.
Advanced accurate temperature control to make much better repeatability.
All process data saved and easier for failure analyzer and process debug.
?Exposed? I/O, A/D, D/A is easier for troubleshooting and maintenance.
Tools would be painted and cleaned up
Chamber would be re-anodized
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Ad Number: 82099
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