The Aura 3010(Aura3000) is a single-wafer downstream photoresist asher, delivers high ash rates with low damage, a large process window, and a choice of process temperatures during the ashing process. The system has a user friendly menu-driven user interface, and is suitable for automation via SMIF (Standard Mechanical Interface) or AGV (Automated Guided Vehicle).
Combined with Allwin21 Corp advanced Robot control technology , Superior Temperature Control Technologyand AW Control Software ,upgraded Gasonics Aura 3010(Gasonics Aura 3000) provides significant advantages over the original systems.
System diagnostics for the quick diagnostic of the system
Easier I/O set and checks function for the Maintenance.
RTP function with temperature control 2C accuracy from 50 to 500C with K-type thermocouple.
Higher through put.
Advanced accurate temperature control to make much better repeatability.
All process data saved and easier for failure analyzer and process debug.
?Exposed? I/O, A/D, D/A is easier for troubleshooting and maintenance.
Tools would be painted and cleaned up
Chamber would be re-anodized
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Ad Number: 82099
About this Gasonics Gasonics Aura 3010 listing - This is a for sale classified ad for a used, surplus or second hand Gasonics Gasonics Aura 3010 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Gasonics Gasonics Aura 3010 listing or view this user's member profile for detailed contact info.
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