The Main Unit's Serial Number Tag Reads (Tag is really hard to read):
Model Number: 100-E
Serial Number: 0056
Maximum Pressure: 4 - 6 bar
Power Requirements: 220 V~, Single Phase, 60 Hz, 4 Amps
The Vacuum Pump's Serial Number Tag Reads:
Type: 303977 D8B Trivac
Category Number: 91255111
Serial Number: 87150088
Volume Flow Rate: 8 m3/h
Ultimate Pressure: < 1 x 10-4 mbar
Filter on Pump:
# Mist Filter CF 4-25, Catalog 10196
# Alumina Filter, Catalog Number: 189 96
Brief Description:
The Technics 100-E is a Plasma Etcher/Asher for depotting of electronic devices, plasma etching and photo resist stripping.
Plasma is generated in a seperate plasma chamber from the process chamber.
Samples can be treated directly in plasma chamber or in process chamber underneath.
Brief Specifications:
Plasma Chamber Size: Quartz with 150 mm O.D.
Maximum Substrate Size: 125 mm diameter or 100 mm square.
Company: MHz Electronics, Inc. Contact Name: Michael Finkelstein Status:Premium Member
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About this PVA TePla / Technics 100-E / 100E listing - This is a for sale classified ad for a used, surplus or second hand PVA TePla / Technics 100-E / 100E equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this PVA TePla / Technics 100-E / 100E listing or view this user's member profile for detailed contact info.