Lam Research Rainbow 4428 Plasma Etcher
? Manufacturer: Lam Research Corporation
? Model: 4428
? Wafer Size: 200mm
? Rainbow Mainframe
? Rainbow System Software Version E1 (Year 2000 Compliant) or later
? Rainbow System Firmware Version G or later
? SECS Communication Port
? EMPAK XT200 cassette input
? Endpoint Detection System, 405/520nm end point box
? ENI OEM650A RF Generator
? Upper and lower RF mini-match
? Power sensor, 1.8-32MHz for RF cal
? High frequency dip board (PCB)
? Gas Box- 8 process gas capability
? Ergonomic Cassette Load/Unload
? Hine 38A Indexers
? Upgraded wafer edge sensor, Rev. E
? Loadlock Wafer sensors
? Flexible 4 Pin Lifter
? Adjustable load lock atmospheric switch
? Special 24V Lockout switch
? RGA test port Extended ?1-piece? test port with manual valve
? Special floor-mounted 4? frame exhaust/6? Connection
? Remote AC/DC power box with 24V fans
Company: Global Fab Surplus Semiconductor Equipment LLC Contact Name: David Lee Status:Premium Member
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Ad Number: 99248
About this LAM Research Rainbow 4428 listing - This is a for sale classified ad for a used, surplus or second hand LAM Research Rainbow 4428 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this LAM Research Rainbow 4428 listing or view this user's member profile for detailed contact info.
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