TEL TE 5480 Nitride Plasma Reactive Ion Etch for Sale.
Reference id: 2181
Manufacturer: TEL
Model: TE 5480
Type: Nitride Plasma Reactive Ion Etch
Condition: excellent
Vintage: Dec 1992
Sales Condition: as is where is
Quantity: 1
Comments: Serial number 4K2279 Deinstalled and barrier bagged, warehoused. Located at the warehouse of SDI Avezzano, Italy. Complete and operational when deinstalled. Tokyo Electron TE-5480 Nitride etcher Deinstalled: 25-Nov-1998 Vintage: 21-dec-1992 Components included: 1.Mainframe. Configured for dual loading of 6 inch cassettes. Singel nitride fitted process chamber MFC Configuration:- STEC 4400MC N2 200 sccm STEC 4400MC O2 100 sccm STEC 4400MC SF6 200 sccm STEC 4400MC He 1 slm STEC 4400MC CF4 200 sccm STEC 4400MC CHF3 200 sccm TYLAN PV104C He 20 slm Daihen Dauma 10SA with Daihen UIM-1-T1 display unit TYLAN PC73 HeLIUM BACK PRESSURE MONITOR 2.Electronics rack 3.Turbo pump. Seiko Seki MG-STPH600C-T52A 4.Pump controller rack with Seiko Seki MG-STPH600C-T54 turbo pump controller, 208V 3 Phase 12 KVA 190kg total power consumption. 5.Loadlock pump Edwards Drystar CDP40 Model A52742934 s/n 6131 V=200 3 phase 50/60 Hz 3.5 KVA 6.Chamber backing pump Edwards CDP80 with Edwards gate valve model GVI 100M 7.Power supply Transformer, I/P 208VAC 3 PH O/P 200VAC 5A dimensions 31cm x 41cm x 42 cm (Height). 8. Chiller SMC Model INR-341-61A Triple Chiller Voltage= 200 3 phase 50/60 Hz 25A 350 kg dimensions 72 cm x 92 cm x 175 cm (height).
Company: SDI Semiconductor Instruments Group Contact Name: Stephen Howe Status:Premium Member
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Ad Number: 63403
About this TEL Nitride Plasma Reactive Ion Etch listing - This is a for sale classified ad for a used, surplus or second hand TEL Nitride Plasma Reactive Ion Etch equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this TEL Nitride Plasma Reactive Ion Etch listing or view this user's member profile for detailed contact info.
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