Posted by:

Location:

Europe - Italy

Ad Status:

Active

Manufacturer:

Type:

Model:

Year (or range of years):

Condition:

Price (in US dollars):

Quantity:

Type of Seller:

Description:

DI ID: 12547
Manufacturer: Varian
Model: EHP 500
Type: Medium Current Implanter
Version: 200 mm
Condition: good
Vintage: Apr 1996
Sale condition: as is where is
Sales price: 1,250,000 USD
Quantity: 1
Comments: deinstalled December 2006.
8 inch open casette loader.
+ Software Version: 12.15 REV. D
+ 70KeV
+ CE Marked: YES
+ Ion Source type: BERNAS SOURCE
+ NO SOLID SPECIES USED
+ Gas species:
+ LINE 1 : AS SDS
+ LINE 2 : P SDS
+ LINE 3 : B HIGH PRESSURE
+ Argon: facilities connection
+ Options:
+ Beam Energy Probe
+ Three Light Signal Status Tower SECS II Communication / GEM
Capable
+ Pumps:
+ 1 CRYO PUMP CT10
+ Load Lock Pump: 2 TURBO PUMPS VARIAN 300
+ Beamline & Source Pumps:
+ Turbo Pump: Seiko-Seiki 1000 (Source Zone)
+ Turbo Pump: Seiko-Seiki 1000 (Scanner)
+ Turbo Pump: Seiko-Seiki 300 (Mirror)
+ Mechanical Pumps: EDWARDS DRY PUMPS (may not be included)
+ Options chosen for E500HP:
+ Rotating Platen
+ Standard Dr Pumps
+ Automatic Accel/Decel
+ 60 kV Mirror Supply
+ Std Cro (Fast Regen)
+ High Voltage Probe
+ Light Tower (3-lamp)
+ 70 kV Extraction Supply
+ 8 mA Accel Suppl
+ Analyizer Vacuum Gauge
+ Isolated Service Cart
+ Seiko Seiki Turbo Pumps
+ Extra Foreline TC Gauge
+ Analyzer Turbo Pump
+ Parametric GAS Setup
+ Bernas Source Magnet
+ Bernas Source
+ TVL Traveling Faraday
+ Electrostatic Clamp
+ Cassette Detect Switch
+ Standard Lcl/Rem P.D.
+ E220 Beam Purity Check
+ Extra PD Board
+ Long napping Prism
+ AVG (Auto Vac Gauges)
+ HP Gas Box
+ Source Seiko Seiki
+ Analizer Seiko Seiki
+ Edwards Booster Pump
+ Beamline Seiko Seiki
+ Edwards End Station
+ Edwards Roughing Pumps
+ 2 Stage Beam Reducer
+ TVL Faraday Lmt Sensor
+ SDS Gas Bottles
+ GEM Host Central