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Location:

Arizona

Ad Status:

Closed

Manufacturer:

Type:

Model:

Year (or range of years):

Condition:

Price (in US dollars):

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Description:

This is a operating Implanter.
The price included De con, De install and crating. Here are the specs.

White (Bernas) Source
Enlarged, or Dual Vaporiser: None
Hi Pressure Gas Line: BF3
Fast Scan: None
Electron Shower II: Yes
Oil, not Glycol, in "Air over Oil" Tank
Vacuum Exchange Arms: Yes
7 Deg White Clampless Discs:
Chamber Backside Vent Kit: None
Belt Drive AT4: Yes
Stainless Steel End Station Panels: Yes
Dataflow: None
DI Water Upgrade Kit: None
EMI Analyzer Magnet Power Supply: Yes
Roughing Pumps: not included
Ion Gauges located below Cryo Isolation Valves: Yes
Grey type Fibre Optic Cables Upgrade: Yes
Remote Chiller Option: None
Kaiser Upgrade to feed HV through transformer cables to the Source: Yes
PROCESS INFORMATIONS
Dose Repeatablity: < 1%
Implant dose Uniformity: < 1%
Particles Performance: < 200 particles added @ 0.3um (For 11B+)
Wafer Charging Control: None
Elemental Contamination: None
Wafer Cooling: Temperature Dot < 100C
Resist Outgasing & PCOMP Issue: Reliability of PCOMP in NV10 unknown
Dataflow: None
Automation: None