SUSS MA4 BSA Mask Aligner

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spectrum

Location:

Pennsylvania

Ad Status:

Closed

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Karl Suss Mask Aligners are regarded as the benchmark in semiconductor submicron research and 3D micro-system production. These innovative systems meet customer's needs for precision and reliability.

This versatile SUSS MA4/6 is available with (optical) bottom-side-alignment microscopes for accurate backside processes. Optical bottom-side-alignment (BSA) has become an important feature, especially in Microsystem Technology.

Lamphouse: 350 Watt lamphouse

Optics: 365nm (NUV) optics

Microscope: M200 split-field optical microscope

CIC Power Supply: CIC 500 constant intensity controller

Wafer Size: Pieces of wafers and full wafers up to 4 inches (100mm)

Wafer Chuck: Includes choice of one (1) wafer alignment chuck for Customer's desired wafer size

Mask Holder: Includes choice of one (1) mask holder for Customer's desired wafer size

Equipment Condition:
Fully refurbished and guaranteed to meet the OEM's original specifications

Warranty: Includes 90-day equipment parts warranty

OPTIONS AND UPGRADES AVAILABLE: EQUIPMENT CAN BE UPGRADED TO OTHER CONFIGURATIONS FOR AN ADDITIONAL COST

MA6 CONFIGURATION OPTION/UPGRADE: This option/upgrade will include replacing 350W lamphouse with a 1000W lamphouse; replacing CIC500 with a CIC1000; upgrading wafer chuck to 6 inch (150mm); upgrading mask holder to 7x7 mask holder. THIS OPTION / UPGRADE IS AVAILABLE FOR ADDITIONAL COST

DEEP UV EXPOSURE (DUV) OPTION/UPGRADE: This option/upgrade will include replacing 350W lamphouse with a 1000W lamphouse; replacing CIC500 with a CIC1000; replacing 350W Hg lamp with a 500W HgXe lamp; upgrading optics & mirrors from UV400 to a UV200 DUV package. THIS OPTION / UPGRADE IS AVAILABLE FOR ADDITIONAL COST