Karl Suss Mask Aligners are regarded as the benchmark in semiconductor submicron research and 3D micro-system production. These innovative systems meet customer's needs for precision and reliability.
This versatile SUSS MA4 is available with (optical) bottom-side-alignment microscopes for accurate backside processes. Optical bottom-side-alignment (BSA) has become an important feature, especially in Microsystem Technology.
Lamphouse: 350 Watt lamphouse
Optics: 365nm (NUV) optics
Microscope: M200 split-field optical microscope
CIC Power Supply: CIC 500 constant intensity controller
Wafer Size: Pieces of wafers and full wafers up to 4 inches (100mm)
Wafer Chuck: Includes choice of one (1) wafer alignment chuck for Customer's desired wafer size
Mask Holder: Includes choice of one (1) mask holder for Customer's desired wafer size
Equipment Condition:
Fully refurbished and guaranteed to meet the OEM's original specifications
Warranty: Includes 90-day equipment parts warranty
OPTIONS AND UPGRADES AVAILABLE: EQUIPMENT CAN BE UPGRADED TO OTHER CONFIGURATIONS FOR AN ADDITIONAL COST
MA6 CONFIGURATION OPTION/UPGRADE: This option/upgrade will include replacing 350W lamphouse with a 1000W lamphouse; replacing CIC500 with a CIC1000; upgrading wafer chuck to 6 inch (150mm); upgrading mask holder to 7x7 mask holder. THIS OPTION / UPGRADE IS AVAILABLE FOR ADDITIONAL COST
DEEP UV EXPOSURE (DUV) OPTION/UPGRADE: This option/upgrade will include replacing 350W lamphouse with a 1000W lamphouse; replacing CIC500 with a CIC1000; replacing 350W Hg lamp with a 500W HgXe lamp; upgrading optics & mirrors from UV400 to a UV200 DUV package. THIS OPTION / UPGRADE IS AVAILABLE FOR ADDITIONAL COST
Company: Spectrum Process Equipment Contact Name: John Gantert
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Ad Number: 111937
About this Karl Suss MA4 series III listing - This is a for sale classified ad for a used, surplus or second hand Karl Suss MA4 series III equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Karl Suss MA4 series III listing or view this user's member profile for detailed contact info.
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