• Fully built to OEM specification and fully functional system for 4-inch wafer or 5-inch wafer
• Cassette-to-cassette wafer movement
• 10X or 15X eyepiece; 10X objective lens
• 250W UV lamp and lamp power supply – USHIO or the equivalent
• Capacitance sensor for indexing wafer sender and receiver
• All assemblies such as illumination system, alignment scope, XYZ unit for alignment scope, auto feeder, mask stage unit, calibrator driving unit, stage units- 1& 2, gap unit are cleaned and rebuilt to Canon factory standard
• Recoated parabolic reflector and new primary and new secondary flat mirrors
• Rebuilt calibrator, wafer chuck and mask holder with rebuild 4-or 5-inch wafer conversion kit
• 3 sets of 4-inch and 3 sets of 5-inch wafer conversion kits
• New belt autofeeder and rebuilt wafer transfer mechanism
• All consumable parts replaced, all covers and isolation table painted
• available to install or power up at customer site
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Ad Number: 112550
About this Canon PLA-501 series listing - This is a for sale classified ad for a used, surplus or second hand Canon PLA-501 series equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Canon PLA-501 series listing or view this user's member profile for detailed contact info.
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