-1505G6E Main Body
( for 5"reticle, 6"wafer,LSA Align system, Auto Leveling, Loader Type1,Pre-Align2)
Reduction projection optical system
Illumination optical system
Auto Focus system
Reticle alignment system
Auto reticle blind system
Safer alignment system
Inter ferometer unit
X-Y Stage
Wafer Table(Holder)
Wafer Loader
Reticle Loader
Environmental Chember
P-Vacuum, N2 or Air, PCW
-Control Rack-3P,220V,10KVA,50A
Stage Controller
Interferometer Counter
Wafer alignment counter
Reticle controller
Lens controller
Wafer Loader controller
Power supply
Reticle loader controller
Operation panel
Minicomputer System
CRT
ITV Controller
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Ad Number: 115495
About this Nikon NSR 1505 G6E listing - This is a for sale classified ad for a used, surplus or second hand Nikon NSR 1505 G6E equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Nikon NSR 1505 G6E listing or view this user's member profile for detailed contact info.
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