Manufacturer: |
ASML / SVG |
Type: |
|
Model: |
SVG 90S |
Year (or range of years): |
|
Condition: |
Excellent |
Price (in US dollars): |
USD |
Quantity: |
2 |
Type of Seller: |
Dealer Owner |
|
Description: |
| |
|
Manufacturer: ASML/SVG
• Model: 90-S I-line Coater/Developer Track
• Wafer Size: 200mm
• 104” Stand-Alone Cabinet
• 4 serial arms and 1 90SE serial arm
• Local exhausted cabinet locations
• Facilities location is through the floor
• Floor is solid SS spill containment w/ overflow
sensors
• Control Module on CES (left or right-integrated)
• MCE on CES
• Rear-pull interface for Nikon B11/12 stepper
• 208 volts, 3-phase, star, 60 Hz
• SECS I/II interface
• Coater/Developer direct floor drain (Tee in cabinet)
• Full / clogged drain sensor on each coater
• Full SEMI S2-93 Containment for solvent/pump
drawer enclosures, bulkhead
• Facility sensors for vacuum generators, DI water and
Caustic exhaust
• Coater - Quantity 2
• Photoresist Temperature Control
• Air Temp / Humidity Control
• Dispense line ID (nozzle tip = 3/16”)
• 1 SS non-coated 3 gallon un-pressurized vessel with Kalrez o-rings and 4 liquid level sensors
• 0.1μm solvent filter per canister
• TEBR, BEBR, SVB - 25cc Millipore unfiltered pump (subject to availability)
• Solvent filter between bulk fill valve and Canister
• Developer - Quantity 2
• 0.1μm Develop filter
• Air Temp / Humidity Controller
• High flow (2 stream) nozzle on center
• 1 SS Tefzel-coated 3 gallon pressurized canister with Kalrez o-rings and 4 liquid level sensors
• Vacuum Bake Ovens, Stacked - Quantity 6
• Vapor Prime Ovens, Stacked - Quantity 2
• Quick disconnects HMDS canister (no exposure)
• Air Venturi, 2 modules/Venturi
• SS, non-coated, 2 gallon, Kalrez o-rings, 2 level sensors, DOT canisters in chemical cabinets
• Chill Plates - Quantity 3
|
This ad has been Closed!
We are sorry but this ad is not available at present; possible reasons for this include:
1. It is an old ad and has been closed by the system.
2. It has been marked as SOLD or FOUND by the poster.
Don't let this stop you though, we have many other similar ads.
Quick Links:
1. Browse Ads
2. Search Ads
3. Registration is Free