ASML SVG 90S Coater/Developer

Posted by:

davidpaul

Location:

Colorado

Ad Status:

Closed

Manufacturer:

Type:

Model:

Year (or range of years):

Condition:

Price (in US dollars):

Quantity:

Type of Seller:

Description:

Manufacturer: ASML/SVG
• Model: 90-S I-line Coater/Developer Track
• Wafer Size: 200mm
• 104” Stand-Alone Cabinet
• 4 serial arms and 1 90SE serial arm
• Local exhausted cabinet locations
• Facilities location is through the floor
• Floor is solid SS spill containment w/ overflow
sensors
• Control Module on CES (left or right-integrated)
• MCE on CES
• Rear-pull interface for Nikon B11/12 stepper
• 208 volts, 3-phase, star, 60 Hz
• SECS I/II interface
• Coater/Developer direct floor drain (Tee in cabinet)
• Full / clogged drain sensor on each coater
• Full SEMI S2-93 Containment for solvent/pump
drawer enclosures, bulkhead
• Facility sensors for vacuum generators, DI water and
Caustic exhaust
• Coater - Quantity 2
• Photoresist Temperature Control
• Air Temp / Humidity Control
• Dispense line ID (nozzle tip = 3/16”)
• 1 SS non-coated 3 gallon un-pressurized vessel with Kalrez o-rings and 4 liquid level sensors
• 0.1μm solvent filter per canister
• TEBR, BEBR, SVB - 25cc Millipore unfiltered pump (subject to availability)
• Solvent filter between bulk fill valve and Canister
• Developer - Quantity 2
• 0.1μm Develop filter
• Air Temp / Humidity Controller
• High flow (2 stream) nozzle on center
• 1 SS Tefzel-coated 3 gallon pressurized canister with Kalrez o-rings and 4 liquid level sensors
• Vacuum Bake Ovens, Stacked - Quantity 6
• Vapor Prime Ovens, Stacked - Quantity 2
• Quick disconnects HMDS canister (no exposure)
• Air Venturi, 2 modules/Venturi
• SS, non-coated, 2 gallon, Kalrez o-rings, 2 level sensors, DOT canisters in chemical cabinets
• Chill Plates - Quantity 3