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Suss ACS8-200AA143 Resist Coater, set up for 8", One coater station, 11" diameter. One Gencobot 7/3L robot, Model 3L7059806, One hot plate oven, One cool plate oven, with Cybor resist pump, Cybor CT62 controller, Model 512 Cybor Power Supply, 4 solvent canisters, One Neslab FTC-350 chiller, Up and running wafers before de-installation, 1998 vintage.
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