Perkin Elmer Micralign 661 HT –3 system
Original 6”system (OEM)
Vintage 1996
Refurbished to following specifications:
Wafer/Mask stages for 150mm wafers
Platform for 150mm wafer Fluoroware Cassette
Dual Pitch Elevators
150mm Pal Wafer Handler
(AVM) Automatic Variable Magnification
3 Channel Uniformity Testing
Air Gage Auto Focus Positioning
Top access cooling
High Throuput Coated Optics (HT)
Narrow Band Secondary Mirror
Mini Mag Strong Shells Positioning
Helium Management System (HUMS)
Motorized Carousel Arm
Pellicle Protection Cassette System
7.25 Mask Carrier and Holder
Company: SEG Semi Equipm. Group Contact Name: Walter Weixler
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Ad Number: 157647
About this Silicon Valley Group 661 HT listing - This is a for sale classified ad for a used, surplus or second hand Silicon Valley Group 661 HT equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Silicon Valley Group 661 HT listing or view this user's member profile for detailed contact info.
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