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Serial number 201341 Configuration:- 1-Four senders and four receivers 2-One stage cooling plate 3-Buffer Unit (wafer in and wafer) 4-Developer cup 2 chemicals 5-Coater 2 nozzle (2 resist line) 6-Two stage hot plate 7-SUB-UNIT with 1 main controller for on line connection System layout:- [long word] | S |S |HP(2) | CP | BU |DEV|DEV |HP(2)| R | R| |(2-1)|(2-2)|(2-3) |(2-4)|(2-5)|(2-6)|(2-7)|(2-8) |(2-9)|(2-A)| [long word] | S |S |HP(2) | CP | BU |DEV|DEV |HP(2)| R | R| |(1-1)|(1-2)|(1-3) |(1-4)|(1-5)|(1-6)|(1-7)|(1-8) |(1-9)|(1-A)| [long word] control units: QTY4 UT230 IND QTY 4 UC230 HP STY 2 UC320 CP QTY 2 UC320 HP QTY 4 UC105 SPIN QTY 4 UC230 HP QTY 4 UC320 IND Control unit dimensions: 121l x 100 x 174 h Schematics and operation manual : Available Parts to be replaced: 1-water chiller manometer 2- rinse nozzle manometer ( dev1 and dev 2 ) 3- reducing valve dev 2 4- dev 1 spray
Company: SDI Semiconductor Instruments Group Contact Name: Stephen Howe Status:Premium Member
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About this TEL Mark II listing - This is a for sale classified ad for a used, surplus or second hand TEL Mark II equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this TEL Mark II listing or view this user's member profile for detailed contact info.
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