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Location:

New Jersey

Ad Status:

Closed

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Model:

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Description:

Model 4000 is a fully programmable automated coat/bake track system.

Specifications:
Programming: 10 programs,
10 steps each

Wafer Sizes: 2" to 150mm

Repeatability: +/- 5rpm

Acceleration: 0-30,000 rpm per second unloaded

Spin Range: 0-6000rpm

Hotplate
Temp. Uniformity: +/- 0.3%

Temp.Range: 1 unit is 50-300 Celsius; 2 units are 50-400 Celsius

Programming: 10 programs, 3 steps each

**Two have never been used**