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SVG Model 90S
9712CAB-08
Wafer Size : 200
Date Manufactured : 01-01-1997
Wafer Size: 200mm, notched, System on floor
Right hand only unit
104? Stand-Alone Cabinet
2 Coat Modules w/chemical edge bead removal, 2 Develop
Modules, 6 Vacuum Back Ovens, 2 Vapor Prime Ovens, 3 chill
Plates, 1 OEBR Module
Photoresist Temperature control
Air Temperature and Humidity control(Coater and Developer)
Complete air recirculation environmental control over all modules
4 serial arms and 1 90SE serial arm
Floor is solid SS spill containment w/overflow sensors
Solid doors in front of gauges and flow meters
Control Module on CES, (left or right-integrated)
Interface is rear pull
208 volts, 3-phase 60Hz
Coater direct floor drain (Tee in cabinet)
Developer direct floor drain (Tee in cabinet)
Full clogged drain sensor on each coater
Full SEMI S2-93 Containment for solvent/pump drawer
enclosures, bulkhead
Facility sensors for vacuum generators, DI water and
Caustic exhaust
SECS Communication Port
Millipore controller / resist pump upgrades
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:198/0
