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Ultratech Stepper, Titan I, 2244i
manufactured in Year 2002

1. Lens type: 1.4 um production resolution
2. 3.5 um usable depth of focus, for thick film application.
3. Field size 44x 22 mm field size and 5"x 5" reticle size.
4. High wafer plane irradiance of 1250 mW/cm2
5. Broadband G + H -line illumination.
6. Quick wafer change kit intergrated for multiple wafer sizes (125, 150, and 200 mm).
7. Machine Vision System (MVS).
8. Installation Available
9. 30-day Warranty for parts