6 inch reticle
U-Lens type UL34
Power source: AC380V 50Hz
Magnification: 1/5X
NA 0.45 to 0.63 (0.63 standard)
Field size: square = 22 mm (X: 26mm, diameter: 31.1 mm )
Illumination: 2kW S.H.P.L
Sigma 0.3 to 0.7 (0.65 standard)
Masking: 4 independent controlled blades
illumination mode: square 0.4 mm to square 26 mm on a wafer
NORMA, SIA, SIB, SIC
Alignment light: He-ne and Broad Band light (B2)
Alignment Method:
1) TTL OFF AXIS method with HE-NE laser light
2) TTL OFF AXIS method with image-processing with B2 light
Components
- Lamp House
- Booth-1 (Main body)
-Illuminator
- D-rack
- Compact chamber
- IA scope
- Chamber parts roof side panel frame
- Accessory box
- Booth ?2 (front machine)
- Top fan
- Lamp house table
Company: SDI Semiconductor Instruments Group Contact Name: Stephen Howe Status:Premium Member
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Ad Number: 75406
About this Canon FPA3000I4 listing - This is a for sale classified ad for a used, surplus or second hand Canon FPA3000I4 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Canon FPA3000I4 listing or view this user's member profile for detailed contact info.
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