SDI ID: 15348
Manufacturer: TEL Tokyo Electron
Model: ACT 8
Description: PHOTO TRACK
Version: 200 mm
Vintage:
Quantity: 1
Sales Condition: inquire
Lead Time: immediately
Comments:
-4 COATER
-4 DEVELOPER
-CURRENTLY WAREHOUSED
-A820C-WBWCQD-UHTP/IF FOR 200 MM WAFERS
-DUV COMPATIBLE
-DIGITAL SHUT-OFF VALVES ON ALL RESIST AND BARC PUMPS
-"ULTRA-HIGH" THROUGHPUT INTERFACE
-BULK FEED FOR SECOND DEVELOPER FROM 5 GALLON CANISTER
-BULK DELIVERY FOR HMDS
-4 X UNI-CASSETTE LOADER
COATER PROCESS UNIT WITH MAIN ARM INCLUDING:-
-RESIST COATER WITH 8 NOZZLES/HPT PUMPS 2 EACH
-BARC COATER WITH 6 NOZZLES/RDS PUMPS 2 EACH
-ADHESION UNIT (ADH) 2 EACH
-LOW TEMPERATURE HOT PLATE (LHP) QTY 3
-HIGH SPEED CHILL PLATE (HCP) QTY 2
-TRANSITION STAGE (TRS) QTY 1
-CUP WASH HOLDER (CWH) QTY 2
-SHUTTLE STAGE (SHU) QTY 1
-PRECISION HOT PLATE (PHP) QTY 4
-BARC CHILL PLATE (BCP) QTY 1
-HI TEMP HOT PLATE (HHP) QTY 6, 3 WITH HIGH EXHAUST OPTION
-IC CUP COAT CUP BOWLS (WITH 2 SPARES) QTY 6
DEVELOPER PROCESS UNIT WITH MAIN ARM INCLUDING:-
-DEVELOPER UNIT WITH QTY 2 "H" NOZZLES ( QTY 4 )
-LOW TEMP HOT PLATE (LHP) QTY 3
-PRECISION CHILLING HOT PLATE (PCH) (QTY 4)
-TRANSITION STAGE (TRS) QTY 1
-HIGH SPEED CHILLING PLATE (HCP) QTY 3
-I/F BLOCK FOR ASML AT-1200 ULTRAHIGH TP
-2 CPL UNITS
-WEE WAFER EDGE EXPOSURE, Ar COMPATIBLE
CHEMICAL SUPPLY INCLUDING:-
DEVELOPER:
1. BULK FEED TO PCS SYSTEM QTY 1
2. 5G CANISER TO PCS SYSTEM QTY 1
FIRM NOZZLE FED BULK TO PCS QTY 1
SOLVENT:
1. BULK FEED TO 2-TANK AUTO SUPPLY WITH QUICK CHANGE FILTER QTY 1
RESIST:
-NOZZLES 1-3 TO SHARE SINGLE BOTTLE
-NOZZLES 4-6 HAVE INDIVIDUAL BOTTLE
21 BOTTLES, CAPS INCLUDED
-T/H UNIT TO BE ESA-8
-BARE SI THICKNESS MONITOR UNIT AND SOFTWARE
-NO CHEMICAL FFU FLITERS INCLUDED
-SRN NOZZLE (1 PER DEV MODULE)
-FIRM DISPENSING HARDWARE ( 1 NOZZLE PER DEV MODULE, ALL FED BY PCS FROM BULK)
-UPGRADED MAY 2004
-4 HPH (IMPROVED PHP PLATE)
Company: SDI Semiconductor Instruments Group Contact Name: Stephen Howe Status:Premium Member
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Ad Number: 76184
About this Tel Tokyo Electron Act 8 listing - This is a for sale classified ad for a used, surplus or second hand Tel Tokyo Electron Act 8 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Tel Tokyo Electron Act 8 listing or view this user's member profile for detailed contact info.
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