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Manufacturer: ASML USA INC
? Model: SVG 90-S
? Wafer Size: 200mm, notched
? 104? Stand-Alone Cabinet
? 2 Coat Modules w/chemical edge bead removal, 2 Develop Modules, 6 Vacuum Back Ovens, 2 Vapor Prime Ovens, 3 chill Plates, 1 OEBR Module
? Photoresist Temperature control
? Air Temperature and Humidity control (Coater and Developer)
? Complete air recirculation environmental control over all modules
? 4 serial arms and 1 90SE serial arm
? Floor is solid SS spill containment w/overflow sensors
? Solid doors in front of gauges and flow meters
? Control Module on CES, (left or right-integrated)
? Interface is rear pull
? 208 volts, 3-phase 60Hz
? Coater direct floor drain (Tee in cabinet)
? Developer direct floor drain (Tee in cabinet)
? Full clogged drain sensor on each coater
? Full SEMI S2-93 Containment for solvent/pump drawer enclosures, bulkhead
? Facility sensors for vacuum generators, DI water and Caustic exhaust
? SECS Communication Port
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