KLA-Tencor P-20h Long Scan Profiler with Wafer Handler
This unit is in great condition, the stage homes and the stylus goes down. The vision seemed to work. The only thing I couldn't get to initialize was the wafer handler and that is because I don't have a vacuum source.
The Unit's Serial Number Tag Reads:
Model Number: 250449
Serial Number: 02940101
Power Requirements: 115 VAC, Single Phase, 4 Amps, 60 Hz
The Stylus's Information Tag Reads:
Model Number: 245496
Serial Number: 02940169
Optics: 4x & 6.3x
Stylus Force:
Drop Force: 5.0 mg
Continuous Force: 2.0 mg
Scan Position Offset:
X: -10
Y: 15
Sense Delay: .2 sec
High Range: 1.000
Scan Length: 0.0000
Backlash: 0
Drop Timer: 35
Linearity:
A: 186
B: 755
Spring Constant: 6.60
Software Installed Description:
# Tencor P-2 Long Scan Profiler 1991-1992
# Version 1.6.4., January 19, 1995
# Serial Number: 02940101
# Sequence / Data Base
# Wafer Handler
# SECS II
# Interactive 3D
Key Features:
# Measurement of vertical features ranging from under 100 angstrom to approximately 0.3 mm, with a vertical resolution of 1 or 25 angstrom.
# Ability to fit and level data, allowing accurate measurements on curved surfaces.
# Handles wafers from 3 to 8 in.
# Full 8 in. scanning.
# Can scan up to 25 wafers without operator intervention.
Company: MHz Electronics, Inc. Contact Name: Michael Finkelstein Status:Premium Member
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Ad Number: 111928
About this KLA-Tencor P20h, P-20h, P-20 /handler listing - This is a for sale classified ad for a used, surplus or second hand KLA-Tencor P20h, P-20h, P-20 /handler equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this KLA-Tencor P20h, P-20h, P-20 /handler listing or view this user's member profile for detailed contact info.
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