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Used KLA Tencor 5200 for sale - Enlarge Picture

KLA Tencor 5200

Statistics: views/answers:11/0
Posted by:
Dbousquet
Location:
California
Ad Status:
Active

Manufacturer:
Type:
Model:
5200
Year (or range of years):
Condition:
Price (in US dollars):
USD
Quantity:
Type of Seller:

Description:
KLA-Tencor 5200 Overlay Inspection System

Automatic arrayed target measurement; CPM advanced overlay.

Bi-directional SECS/GEM Communication.

0.02 particles/cm2/pass

Unlimited sites

Low backside contamination including coating

< 5 nm accuracy

Throughput > 95 wph (5 sites/ wafer

< 4nm Repeatability

208/220 VAC, 15-20A, 50/60 Hz, single phase

Company: SPEC Equipment
Contact Name: David A. Sardi
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Ad Number: 114556
About this KLA Tencor 5200 listing - This is a for sale classified ad for a used, surplus or second hand KLA Tencor 5200 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this KLA Tencor 5200 listing or view this user's member profile for detailed contact info.