Non-Patterned Wafer Surface Inspection System.Throughput 150 per hour of 200mmWafer Size 100,125,150,200 mm KLA-Tencor Surfscan 6220 Unpatterned Surface System Inspection System Wafer Size 100,125,150,200 mm System Calibrated, And Tested At SPEC Equipment. Sensitivity: 0.09um @ 80% Capture Rate Repeatability is less than 1.0% at 1 of 0.204 diameter latex spheres on bare silicon Throughput 150 per hour of 200mm Contamination is less than 0.005 particles/cm2 greater than 0.15um Illumination source is 30mW Argon-Ion laser, 488 wavelength Haze Sensitivity is 0.02ppm3
Company: SPEC Equipment Contact Name: David A. Sardi
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Ad Number: 114580
About this KLA Tencor 6220 listing - This is a for sale classified ad for a used, surplus or second hand KLA Tencor 6220 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this KLA Tencor 6220 listing or view this user's member profile for detailed contact info.
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