KLA 8100 CD SEM designed to perform automated CD measurements on submicron IC features reliably, accurately, and rapidly. System accommodates 100, 125, 150, and 200 mm wafers from three cassette platforms located at the front of the instrument with no hardware modifications. The KLA 8100’s advanced automation capability allows it to operate completely unattended at speeds in excess of 40 wafers per hour.
For specs and additional photos, please refer to our website:
www.photonicmicrodevices.com
Company: Photonic Microdevices Inc. Contact Name: Roland Levy Status:Premium Member
adid=129448
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Ad Number: 129448
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