Rudolph Auto El III (3) 2B, 4A Auto Ellipsometer

Posted by:

testeqe

Location:

Arizona

Ad Status:

SOLD

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Description:

Rudolph Auto El III Ellipsometer

The unit was refurbished by Rudolph approximately 9 months ago. It is guaranteed to work but calibration is the responsibility of the buyer. Tool demo available upon request. Options believed to be installed are listed below. There is no calibration standard.

The Unit's Serial Number Tag Reads:
Model Number: III - 2B, 4A
Serial Number: 7419
Power Requirements: Says 220 but there is a tag below that says setup for 110 (it runs on 110 as well).

Options Installed:
Option 2: Sample Stage
# Option 2 sample stage has vertical adjustments plus two-axis tilt adjustments, plus two calibrated orthogonal translations in the plane of the sample. Translation range 1" (2.54 cm), resolution 0.001" (0.025mm) in both directions.

Option 4A: Microspot Optics
# Spot Size: 0.001" (25µ)
# The optional microspot optics are designed to be attached by the user to the polarizer module. Note that, although the beam cross-section is circulator, the obliquely-illuminated sample area is elliptical - e.g., at 70° angle of incidence, the minor and major axes of the spot are 0.001" and 0.003" respectively.

Description:
The Rudolph Auto El III Ellipsometer displays film thickness, index, order thickness, substrate N and K. It has a built in printer as well.