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Serial number 219
can quote for installation if required.
Hi-res printer,Resolution 3.4 to 3.6 nm at 600v, pipeline mode better than 90 wph, 3 sigma on 0.3 um line=0.3,loadable wafer size 4.5 inch, 125 mm, 200 mm, operating system V7.6,8100 sw version 2.3.2, stage precision 1.4 um in x and 1.6 um in Y, column Vacuum 1.5 x 10-7 Torr, Chamber vac. 1.8 X 10-7 Torr,
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