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Europe - Italy

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SOLD

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CAN BE SOLD "AS IS" , or Fully refurbished and demonstrated.
Install to OEM specs and 30 days warrenty.included.
serial number 0597-8088
The AIT I is an in-line, automated, full-wafer inspection system for detecting
pattern defects and particles as small as 0.10 µm on patterned and bare silicon
wafers. The system uses laser light scattering to detect and locate pattern defects,
contaminants, particles, and other features on the surface of the wafer. The AIT’s
high speed allows more wafers to be fully inspected at more process steps,
improving the chances of early detection of process excursions, which reduces
wafer loss for higher yields.
Some of the AIT I features are:
• High detection sensitivity, even for difficult after-etch, after-develop, and chemical mechanical polishing (CMP) inspection levels.
• A unique multi-channel collection optics system with independent programmable spatial filter (PSF), variable aperture stop (VAS), and polarization settings.