SERIAL NUMBER PL49009
For measurement of Boron and phosphorus concentration on wafer surfaces via total internal x-ray fluorescence.
Will also measure various elements layer thicknesses such as Al,Ti, W, Cu and other metals.
INCLUDES MANUALS
CE MARKED
Depth directional analysis can be performed from 0 to 0.7 degrees incident angle.
Elemental range from 11Na to 92U
Detection limit: surfacxe contamination elements of 26Fe to 30Zn 5 x 103 atoms cm2 or less
located at warehouse of sdi, avezzano, italy (near rome)
Basic specification:-
Xray tube
target: Tungsten
Max rating: 18 kW, 40 kV 450 mA
tube voltage setting: 20 to 40 kV in 2.5 kv steps
tube current setting: 10 to 450 mA, 5 mA steps
cooling method: water
exhaust: 150 l/sec turbo pump
vacuum: 10-7 torr or less
Company: SDI Semiconductor Instruments Group Contact Name: Stephen Howe Status:Premium Member
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Ad Number: 134972
About this Rigaku 3726 listing - This is a for sale classified ad for a used, surplus or second hand Rigaku 3726 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Rigaku 3726 listing or view this user's member profile for detailed contact info.
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