Therma-Wave Optiprobe 2600B Inspection System

Posted by:

testeqe

Location:

Arizona

Ad Status:

SOLD

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Model:

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Description:

KLA Therma-Wave Optiprobe 2600B Film Thickness Measurement System

The unit looks complete. We can only test for basic power and inspection is welcomed. It is being sold as-is.

The Unit's Serial Number Tag Reads:
Model Number: OP2600B
Serial Number: 6369
Manufactured Date: September, 1996

The Machine's Specification Tag Reads:
Model Number: OP2600B
Power Requirements: 110 V, Single Phase, 50/60 Hz, 7.5 FLA

Specifications:
# Wafer Size: 200mm
# SECS II/GEM 3.0 Interface
# Dual bay/chase controls
# Bulkhead model with mini environment
# Lamp spectrometer special (Not sure if this is there)
# Full array spectrometer
# Diode laser
# Beam profile ellipsometer (BPE)
# Beam profile reflectometer (BPR)
# Objective lens
# Brooks Automation / Equipe Technologies ATM Wafer Robot Transfer System
# Pattern recognition subsystem
# 1.44MB floppy drive
# Vane anemometer for internal airflow testing
# X/Y/Theta stage assembly
# Ion shower assembly
# ULPA filter (not included as we did not get it)
# Comp motor PC23 stage controller