Posted by:

danbane

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U.S.A.

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Closed

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Description:

Applied Materials SEMVision
- Wafer size 200 mm and 300 mm
- Automatic Dual-beam Integrated
Defect Review and Classification
SEM w/integrated Focus Ion-beam
- G2 FIB
- DR SEM
- GaAs source
- SEM column rotate 0 - 45 degrees
- Brightfield - 2x, 20x & 100x
- Darkfield - 20x & 100x
- EDX detector with cold head
(IGC Poly Cold)
- FIB
- Metal etch, Metal dep,
Ins etch, Ins dep
- Mfg 2003
- CE mark
- Pumps - B/E QDP 80 & QDP 40
- UPS
- Chiller - Hakais
- Cryo - Tiger IGC APD
- Manuals - User, PM, Startup
- Sources - Nine 5 gal pails
- Located in a clean room