Posted by:

danbane

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U.S.A.

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Closed

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Description:

 Configured for 200mm Wafers (two 6” or 8” Cassette Stations)
 Manufactured 2000
 Serviced by OEM While In Production
 Original Spec of 4nm at 1KV with SEM Perspective Imaging
 High Resolution Color Optical Microscope
 SEM 45 Degree Tilt
 Automated Review Flow
 Color MPSI for Enhanced Topography & Material Information.
 SYSTEM OPTION
 Integrated EDX Spectrometer
 Integrated Energy Dispersive X-Ray Spectrometer (Nitrongen Free Cooling)
 SEM Based ADC Package
 Remote Workstation – ability to perform off-line tasks such as Results Analysis and off-line classification.
 SECS-II GEM