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KLA-SensArray RTD Thermal TRACK 4 Portable Measurement System/Data Logger for Instrumented Process Wafers
This unit was Intel surplus. I tested it with a 1375 Ω Resistance Standard and the unit ranged from 1374.8 to 1350 Ω. It is guaranteed to work. The resistance standard was calibrated on April 12th, 2007 and expired April 10th, 2008. The resistance standard is not included in the auction.
The Unit's Serial Number Tag Reads:
Model Number: 482-08-4002
Serial Number: 04154
CE Marked: Yes
Information from the Unit's Menus:
# Aero 1500 Compaq PDA
# Application Version: 4.1.3. Build 1
# Was Used on SVG90 - DCT Tracks, TEL ACT8 - QCT, BCT, NCT Tracks, PPI, HBT
Key Features:
# Portability with no sacrifice in accuracy
# Exceptional performance for steady state measurements
# Easy-to-use software interface
# Versatile control and display using a Pocket PC
# Convenient, efficient data display, logging, management, and downloading.
Many Valuable Applications:
Use your Thermal TRACK 4 to accurately record real-time, in-situ temperature measurements in many processes, including photolithography and thin film applications. Here is just a sample of what you can do:
# Calibrate and check temperature setpoints for photoresist track systems
# Characterize wafer-temperature profiles in cold wall processing systems
# Troubleshoot temperature-related critical dimension problems
# Run predefined preventive maintenance checks tailored to your equipment and process
Description:
When it comes to measuring wafer temperature, everything you need is in the palm of your hand-with Thermal TRACK 4. This unique device accurately records the wafer-temperature and uniformity measurements you need to characterize, optimize, and maintain your processing equipment's thermal performance. Which means you can control critical dimensions and ensure repeatable, optimal processes in your advanced semiconductor, LCD, or memory-disk fab.
With Thermal TRACK 4, you get the portability, convenience, and ease of use of the Compaq Pocket-PC, a hand-held PDA. You also get powerful data acquisition based on SensArray's proprietary parallel channel technology. Using test scripts, configure unique wafer temperature testing and maintenance for each of your processes. Set pass/fail parameters. And, you can organize and store maintenance test data by specific process modules, by each system in the fab, and by users.
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