KLA-Tencor Surfscan 6200 Wafer Surface Analysis System

Posted by:

testeqe

Location:

Arizona

Ad Status:

SOLD

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KLA-Tencor Surfscan 6200 Wafer Surface Analysis/Particle Counter System

The unit was removed from a university that is down sizing due to budget cuts. It was setting in their inventory in a warehouse when we got it.

The Unit's Serial Number Tag Reads:
Model Number: 168904
Type: SFS-6200
Serial Number: 0196-471
Date of Manufacture: January, 1996
Power Requirements: 208 V, Single Phase, 60 Hz, 16 A

Key Features:
# Wafer Surface Analysis System/Particle Counter For Non-Patterned Wafers.
# Wafer size from 2" to 8" dia.
# Sensitivity - Particle: .117 micro-meter dia. latex spheres with > 90% capture rate.
# Haze: .1 ppm minimum.
# Cassette to cassette handling.
# Supplies enlarged 3D images, scan prints for quick analysis.