The SEM Vision CX Scanning Electronic Microscope known as a Defect Review System, automatically reviews and classifies wafer defects in advanced semiconductor production lines. The system can examine up to 500 defects per hour and offers multiple perspective SEM imaging for enhanced topography and material information about defects on patterned wafers. Using operator-free EDX analysis, the microscope features automatic material identification to characterize defects on unpatterned wafers, such as monitor wafers and those with blanket films or planarized surfaces.
The tool classifies defects by type, material properties, and other operator specified characteristics. Its ability to quickly provide information on patterened and unpatterened wafers helps users control process excursions and correct defect sources in a timely fashion. The system also creates a database of information for future references.
The system is currently configured for 8? wafers, and is Applied Materials serial number W867.
Company: Montara Industries Contact Name: John Moore
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