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Location:

Arizona

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SOLD

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Description:

The S-6000 is an instrument for measurement of submicron
Dimensions which are becoming new design standards for

Process and quality control to recent VLSI or USLI semiconductor

Services.



Wafers; 3",4",5",6" dia wafers. Measurement range 0.5-200um

Reproducibility of measurement. ±1% or ±0.02 um whichever is greater)

Throughput: 5 wafers/hour. Resolution: 15 nm (at 1 kV operation; TV-scan
image)

Accelerating Voltage: 700 V -2000 V (100 V/ step)

Features:

·Cold field admission electron source


·Automatic Wafer transfer (manual loading also)


·Magnification:
100 X - 150,000 X


·Two Seiko-Seiki turbo pumps



·Three ION pumps



·Two mechanical pumps



·Requires: 100 - 240 VAC, 1PH, 7KVA,50/60 HZ