Manufacturer: |
Nanometrics |
Type: |
Metrology |
Model: |
8000XSE |
Year (or range of years): |
1997 |
Condition: |
Excellent |
Price (in US dollars): |
USD |
Quantity: |
1 |
Type of Seller: |
Dealer Owner |
Description:
|
| |
|
Manufacturer: Nanometrics Model: 8000XSE
Mfg Date: Sept. 1997
Used fully refurbished cassette to cassette thin film mapping tool includes pattern recognition for initial setup on test site, 100mm-200mm wafer handling, >75 wafers/hour with 5 measuring sites on a 200mm wafer, Software ver. 1.41, SECS II interface, Kensington submicron precision 0.5 micron xyz stage and wafer handling robot with laser CCD prealigner, J.A.Woolam Ellipsometer M44, LPS-300 75W light source, Cohu camera, Nikon objectives: E4x/0.10/160mm, E10x/0.25/160mm,40x ELWD/0.55/160mm with variable aperture and Ealing X15/0.28 reflecting UV objective,115V, 5 amp, 30/60Hz, software license not included
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