SemiTest SCA-2500 Wafer Surface Charge Analyzer

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testeqe

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Arizona

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SOLD

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Description:

SemiTest SCA-2500 Wafer Surface Charge Analyzer with the AL-1 Automatic Wafer Loader

There is no software included (The software and licensing is $15,000.00 from the Factory)

The SCA-2500's Serial Tag Reads:
Model Number: SCA-2500
Single Phase: Frequency 50/60 Hz, 750 VA Max.
Line Voltage: 105 to 125 VAC
Vacuum: 600 mm of Mercury (Hg) minimum.
Nitrogen (if used): 15 PSIG (1.0 Bar) Min., 100 PSIG (6.7 Bar) Max.

The AL-1's Serial Tag Reads:
Model Number: AL-1
Single Phase: Frequency 50/60 Hz, 1000 VA Max.
Line Voltage: 100 to 120 VAC
Vacuum: 20 inches of Mercury (Hg) minimum.

In Addition to the Main Units there is the Following:
# Hewlett Packard 692C Color Inkjet Printer (Not intended for clean room use)

# Key Tronic Track101 101-Key Keyboard with a Trackball

# Dual Reference Capacitor

# SCA Checkout Wafer (NSC=1.22 E 15)

# Qty. 4: SCA Probes Model C2B

# Power Cords

# Wafer Platform (goes into the SCA-2500)

# Lubricant in a Syringe

# Various Mounting Hardware

# Serial Port Cables included Z-bot, Aligner and more

# Air/Vacuum Tubing

The SCA-2500 is useful for monitoring the following processes:
# Thermal oxidation

# CVD films/plasma etching

# Wet or dry cleans

# Photoresist stripping

# Incoming wafer inspection

# Epitaxial silicon growth

SCA-2500 Surface Charge Analyzer Specifications:
Test Parameter Ranges:
Conductivity Type: n or p
Doping Concentration (Nsc): ND or NA from 1013 to 1017 cm-3
Total Oxide Charge (Qox): 1 x 109 to 2 x 1012 q/cm2
Density of Interface Traps (Dit): 1010 to 1012 cm-2eV-1 *
Data Displayed: Depletion Width (Wd) versus Induced Charge (Qind), Density of Interface Traps (Dit) versus Energy Distribution (Eit)
Test (Probe Model C2B):
Total Area: 6 mm x 6 mm (36 mm2)
Signal (Active) Area: 2 mm diameter
Pressure Applied to Wafer by Probe: 2 oz. total (over 36 mm2 area)
Body Material: Silicone rubber
Wafer Contact Material: Mylar film
Wafer Sizes: 100 to 200 mm diameter
Control System: 3-1/2" (1.44 Mb) diskette drive for exporting data, 850 megabyte (min.) fixed disk for data storage, High-resolution flat-panel display screen, Operator keyboard, Trackball
Dimensions (without AL-1 Loader):
Height: 24.0 inches (61 cm)
Width: 34.0 inches (86 cm)
Height: 21.0 inches (53 cm)
Weight (without AL-1 Loader): 160 lbs. (73 kg)
Power: Factory wired for 100, 115, or 220 V, 50/60 Hz, 750 VA max. Line voltage tolerance +/- 10%
External Vacuum: 530 mm (21 inches) Hg to 710 mm (28 inches) at 0.01 m3/min. (0.31 cfm) 1/4-inch Swagelok fitting
Environment: Requires Class 100 or better area with no particles visible
Clean Room Compatibility: Consistent with Class 10 requirements
* The Interface Quality Factory (IQF) parameter is available for measuring wafers outside the Dit range.