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Simultaneous Multilayer3
Transparent
on Transparent4: Total thickness of top
2 layers >200A, measured
simultaneously on a 2 or 3
layer stack
Oxide on Poly1: <100A to 1.0 µm oxide
on >500A poly
Refractive Index Range5
Oxide: 700A to 1.0 µm
Oxynitride/Nitride: 700A to 1.0 µm
Production-Worthy Design
A single light source, a long life Xenon lamp,
ensures a seamless transition between visible
and UV light in the 200 - 830 nm wavelength
range. The UV-1050 system has selectable
spot sizes which provide maximum flexibility.
The 2.7 micron spot can be used to measure in
patterned areas on product wafers; while the
larger 40 micron spot is available for highly
scattering film like polysilicon and amorphous
silicon where spatial averaging is required to
assure accurate measurement.
The UV-1050's field-proven pattern
recognition, extensive analysis software, and
high reliability add up to an advanced thin
film measurement tool with the lowest cost
of ownership in its class.
Selected Specifications
Measurement capabilities
Thickness Range
Oxides: <20A to 40 um
Nitrides/Oxynitrides: <40A to 40 um
Photoresists/Polyimides: <500 A to 15 um
Oxide on Poly1: <100A to 1.0 um
oxide on >500A poly
Poly1 on Oxide: 200A to 2.0 um poly on
80A to 4,000A oxide
Poly1 on Nitride: 200A to 2.0 um poly on 80A to 4,000A nitride
Amorphous Silicon1: 200A to >1.0 um
amorphous Si on 80A to 4,000A oxide
Oxide on Aluminum2: <1,000A to 3.0 um
Oxide on Tungsten2: <1,000A to 3.0 um
Reflectivity Range
220 nm to 800 nm, direct measurement
Performance Specifications
Absolute Accuracy6
Thickness: 125A to 250A ± 2.5A of NIST
certified range
250A to 1.0 um ± 1% of
NIST certified range
Precision7
Thickness: 2.0A, 3 sigma @ 20A to 40A,
oxide only
1.6A, 3 sigma @ 40A to 70A
1.3A, 3 sigma @ 70A to 250A
2.0A, 3 sigma @ 250A to 2,000A
0.1%, 3 sigma @ 2,000A to 1.0 um
Refractive
Index8: 0.00225, 3 sigma for oxides
and oxynitrides
Reflectivity: 248 nm - 2.25%, 3 sigma
365 nm - 0.75%, 3 sigma
436 nm - 0.75%, 3 sigma
Dimensions
Height: 63 inches (160 cm)
Width: 57 inches (145 cm)
Depth: 39 inches (99 cm)
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