Novellus/Westech/SpeedFam/IPEC AvantGaard 676 Chemical Mechanical Planarization System Polisher
The system was removed from service in working condition and professional decontaminated however we are unable to test it. It is not in clean room packaging. It is sold as-is. It looks complete and does have most, if not all, of the cables that connect the chase control panel to the polisher. It also has the disconnect power box.
The Polisher's Serial Number Tag Reads:
Model Number: MP400
Serial Number: 3053
The Chase Panel's Serial Number Tag Reads:
Model Number: 676
Serial Number: 3053
Power Requirements: 120/208 VAC WYE, 3 Phase, 60 Hz, 60 Amps Max.
Items Included:
# Main Polishing Unit
# Chase Control Panel
# Genmark Gencobot 3L / 4 Robot with End-Effector
# Wafer Address Sensors, Model M-825 (25 Wafer)
The Unit Was Being Used with the Following Chemicals:
# Hydrogen Peroxide (7.4% to 50% concentration)
# Semi-Sperse W2000 (DI Water and Proprietary Metal Oxide)
Highlights:
The AvantGaard 676 is capable of throughput of 40 or more wafers per hour and offers one of the industry's smallest footprints. These systems can be used to polish either oxide or metal layers, allowing customers to reduce the number of different CMP systems in a wafer fabrication facility. IPEC's newest systems also are designed to improve yields by use of an orbital polishing motion rather than conventional rotational CMP techniques. IPEC's design strategy emphasizes higher levels of reliability and ease of use.
Description:
The SpeedFam-IPEC AvantGaard 676 Chemical Mechanical Planarization System is used during the semiconductor manufacturing process to planarize individual layers in complex integrated circuits to customer specific parameters. The system (Tool) has four wafer planarizers, an endpoint detection system, dual pad conditioning systems, a fully automated cassette to cassette (C2C) system to move the wafers, and a separate Electrical Cabinet.
Company: MHz Electronics, Inc. Contact Name: Michael Finkelstein Status:Premium Member
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