Module Type UV Cureing
Front End
Front End Configuration 2 Loadport
Pod Loader Type V6
Atmospheric Robot Type Reliance
AWC Installed Yes
AWM Installed No
AutoCal Installed No
Load Locks (Left and Right)
Chamber Gate Valve typeType L-Motion
Single/Dual LL Pump Single
Pedestal Type Standard
Actuator Type Pneumatic
Preheat Option Installed No
Gas Box Configuration
MFC 1 Aera / N2
MFC 2 Aera / He
MFC 3 Aera / N2O
MFC 4 Aera / O2
MFC 5 Aera / He
Chamber
Manometer Size 10 Torr
Lamp 6ea (Nordson)
Pedestals Standard (Ceramic)
Power supply
Manufacture KRONOS
Model HIGH VOLTAGE,480VAC, 60HZ,40KW
Company: Trust Technology Corporation Contact Name: Ken Chokan Status:Premium Member
adid=132064
onClick='enterWindow=window.open("/favorits.php?adid=132064","Favorites","width=400,height=200,top=200,left=200"); return false'
onmouseover="window.status='Put this Ad in My Favorites'; return true;"
onmouseout="window.status=''; return true;">
Ad Number: 132064
About this Novellus Vector listing - This is a for sale classified ad for a used, surplus or second hand Novellus Vector equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Novellus Vector listing or view this user's member profile for detailed contact info.
:81/0
