AG Associates Heatpulse 8108 RTP Rapid Thermal Processing System
The unit came out of service at Intel where it sat in their storage for a little bit. We do not have the expertise to fully test this item and are selling it as-is. Additional accessories not pictured are included. I will be getting pictures of these as well as additional pictures of the tool in the near future.
The Unit's Serial Number Tag Reads:
Model Number: 8108
Serial Number: 1195162
Date of Manufacturer: 9/95
Key Features:
# Wafer Size 4", 5", 6", 8"
# Robot control ability. (Equip Tech. robot with one arm)
# Single Wafer Process.
# Gold coated aluminum chamber with water cooling
# Radiation heating lamp module
# 4-gas channel with 4 MFCs
# Cassette to cassette wafer handling
# Precise Temperature/Time control, Temperature measuring precision ±1°C.
# Multiple cycle processing capability
# High-intensity visible radiation heats wafers for short periods. Fast heating and cooling rates unobtainable in conventional technologies.
# Consistent wafer-to-wafer process cycle repeatability.
# Elimination of external contamination.
# Small footprint and energy efficiency
Description:
AG Heatpulse 8108 Series are single-wafer, cassette-to-cassette rapid thermal processors, capable of processing in inert or corrosive ambient. The unit is built for the production environment. AG8108 is a rapid thermal processor which uses high-intensity, visible radiation to heat single wafer for short periods at precisely controlled temperatures.
Company: MHz Electronics, Inc. Contact Name: Michael Finkelstein Status:Premium Member
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Ad Number: 139037
About this AG Associates Heatpulse 8108 listing - This is a for sale classified ad for a used, surplus or second hand AG Associates Heatpulse 8108 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this AG Associates Heatpulse 8108 listing or view this user's member profile for detailed contact info.
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