Seiko SIR3000 FIB Photomask Mask Repair System

Posted by:

testeqe

Location:

Arizona

Ad Status:

SOLD

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Description:

Seiko Instruments (SII) SIR 3000 Focus Ion Beam Photomask Repair System

The unit appears to be missing its computer but otherwise looks complete. Please arrange inspection before purchase however to make sure. The unit was used at an Intel facility and during transport some panels fell off and received dents. This unit is being sold as-is.

The Unit's Serial Number Tag Reads:
Model Number: SIR 3000
Serial Number: 931P08-01
Power Requirements: 200 VAC, 4 Wire, 3-Phase, 50-60 Hz, 40 A Max.

Brief Description:
Seiko SIR3000 FIB (focused ion beam) mask repair system. This system is a sophisticated secondary ion mass spectrometer (SIMS) that uses a focused primary beam of gallium ions to both image and repair mask defects. Both opaque and clear defects can be reconstructed by the gallium beam. The SIR3000 system uses a proprietary material (alpha-gas) to reduce glass damage caused by the sputtering process. The SIR3000 utilizes FIB technology to repair clear and opaque defects on photomasks used in microlithography down to 0.25-micron sizes.