We can demo machine for customer inspection.System configured to accept 300mm or 200mm wafers, via an open cassette
Vintage: 2002
KLA-Tencor Surfscan DLS Wafer Surface Analysis System
Includes:
.050 Defect Sensitivity on polished bare Silicon.
Enhanced Edge Exclusion
Enhanced Rough Film Sensitivity
Argon Ion Laser (488 nm)
4 Dark Collection Channels (Normal Wide, Normal Narrow, Oblique Wide,
Oblique Narrow).
RTDC (Real Time Defect Classification).
Map to Map.
Measurement Chamber with ULPA Filter and Blower Unit.
Operator Interface.
Puck Handling- 300/200. 200 mm Edge Handling System Option.
Brightfield Option. Dual Plane Brightfield.
XY Coordinates.
SECS 1.
Purchased new for $1.1 Million
adid=151387
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Ad Number: 151387
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