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Arizona

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SOLD

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BOC Edwards Gradient Point W-75 Wet Scrubber for Exhaust Gas Abatement in Metal/Poly Etch, LPCVD/PECVD Nitride and Epitaxy.


The Unit's Serial Number Tag Reads:
Model Number: W-75
Part Number: NPU571000
Serial Number: 060103
Power Requirements: 120/208 V, Single Phase, 4 Wire, 60 Hz, 9.5 Full Load Amps
Largest Motor: 8.0 Amps
Interrupt Circuit: 10,000 A, I.A.C.

Brief Description:
BOC Edwards offers point-of-use water absorption or chemically dosed wet scrubbers. Systems are suitable for the treatment of exhaust streams containing water-soluble and water-reactive gases. Process chamber water scrubbers are suitable for Metal Etch, Poly Etch, LPCVD Nitride, PECVD Nitride and Epitaxy. Wet Chemistry water scrubbers are suitable for Spray Acid Tools.