NEW MKS/ENI OEM-12AM/12A RF Plasma Generator made for Applied Materials Precision 5000 Chambers (AMAT PN: 0240-09772)
The manual with the RF Generator said it was a OEM-12AM but the unit itself says OEM-12A-21041-51. The paperwork with it says it was for an Applied Materials Precision 5000-0004 Etch Chamber and it can be used on A, B, C, or D Chambers.
The unit is brand new and was originally in an AMAT box but the box fell apart. It is guaranteed to work.
The Unit's Serial Number Tag Reads:
Model Number: OEM-12A-21041-51
Serial Number: 5610 SB225
Date: 01/26/96
Revision: G
The AMAT Informational Tag Reads:
Part Number: 0240-09772
Description: WPIK 1200 Watt RF Generator
For: Precision 5000-0004
Company: MHz Electronics, Inc. Contact Name: Michael Finkelstein Status:Premium Member
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Ad Number: 104837
About this ENI / MKS / AMAT / Applied Materials OEM-12A / 12AM listing - This is a for sale classified ad for a used, surplus or second hand ENI / MKS / AMAT / Applied Materials OEM-12A / 12AM equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this ENI / MKS / AMAT / Applied Materials OEM-12A / 12AM listing or view this user's member profile for detailed contact info.
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