Refurbished Comdel CX-5000S & CX-5000DC RF Generator and DC Power Supply for Applied Materials, Part Number: 0190-18052W
The units are either refurbished by Applied Materials or Comdel for Applied Materials. They are guaranteed to work with certificate of compliance (6/9/2003). The CX-5000 is the same as the CX-5000S with the S being a later revision which has a higher VSWR tolerance.
The RF Generator's Serial Number Tag Reads:
Model Number: CX-5000S/13.56
Serial Number: 067
Part Number: FP3515RD
Date of Manufacture: 11-06-96
Vendor Number: 10818900
Power Requirements: 3 Phase, 208 VAC, 50/60 Hz
The DC Power Supply's Serial Number Tag Reads:
Model Number: CX-5000/DC
Serial Number: 072
Part Number: FP6600RC
Date of Manufacture: 11-20-96
Vendor Number: 10818900
Power Requirements: 3 Phase, 208 VAC, 50/60 Hz
The Applied Material's Tag Reads:
Part Number: 0190-18052W (the W means refurbished)
Description: wDual RF Generator 5kW Low K Chamber
Description:
The CX5000S/13.56 RF amplifier operates at a frequency of 13.56 MHz. The power source produces maximum transfer of power into a 50 ohm resistive load and is designed to withstand large deviations in load impedance without failure. The primary features of the CX5000S series are its solid-state design, small physical size and reliability.
CX5000S series power amplifiers can be supplied with internal frequency sources or may be driven from external frequency sources having a 50 ohm output and a digital drive level of 0-5 V.
# The CX5000S series amplifier is constructed with two sections: The DC power section is contained in a separate 10.5”(267mm) x 19”(483mm) rack unit. This section includes all of the filter capacitors, rectifiers and regulators as well as the three-phase 208 VAC power transformer. The bridge rectifiers are mounted on a water-cooled heatsink. These components are operated at about half of their rated outputs to insure the high reliability of this section.
# The RF section of the amplifier is mounted in a separate 5.25”(133mm) x 19” (483) rack unit. This section consists of the internal/external oscillator frequency control board (OCB), water-cooled driver, four water-cooled PA1250S power amplifiers, an RF combiner, and an output matching network/harmonic filter. All components are used well below their dissipation ratings for long life and low maintenance operation.
Company: MHz Electronics, Inc. Contact Name: Michael Finkelstein Status:Premium Member
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