MKS ENI OEM-28B-04 RF Plasma Generator

Posted by:

testeqe

Location:

Arizona

Ad Status:

Active

Manufacturer:

Type:

Model:

Year (or range of years):

Condition:

Price (in US dollars):

Quantity:

Type of Seller:

Description:

MKS / ENI OEM-28B-04 RF Plasma Generator

2 units available. They are guaranteed to work. They were used on a Novellus Concept 2 CVD System that we sold separately.

Model Number: OEM-28B-04
Serial Number: 1372
Revision: N
Date: 09/17/99
Input: 208 VAC, 3 Phase, 4 Wire, 25 Amps Max.
Output: 2750W Max.
Weight: 84 kg. (185 lbs.)

2750W High-Frequency RF Power for Plasma Applications:
# Unprecedented Reliability

# 53% RF Power Margin

# Microprocessor-Based Control

# Unconditional RF Stability